Highly efficient and aberration-free off-plane grating spectrometer and
We demonstrate a novel flat-field, dual-optic imaging EUV—soft X-ray spectrometer and monochromator that attains an unprecedented throughput efficiency exceeding 60% by design, along
Ultra-broadband spectrometry in the EUV
The spectrometer measures reflectance as well as transmittance in the wavelength range from approximately 2 nm to 18 nm. It is based on the emission of a gas discharge-produced plasma
EUV Measurement Technologies
One of the most promising methods is spectroscopic reflectom-etry in the extreme ultraviolet (EUV) wavelength range (Banyay et al. 2012).
High Performance Optical Spectrometer Products
Scientific optical spectrometers are used to measure light intensity and spectral composition across VUV, UV, XUV, EUV, and X-ray wavelength regions.
EUV metrology | TOS | RWTH Aachen University | EN
The EUV scatterometer is an extension module for the EUV spectrometer which was developed by the research group. With this module, the full diffraction pattern of
Monochromators for Soft X-ray, XUV and Extreme Ultraviolet
Soft X-ray and Extreme Ultraviolet (and into the VUV) The following table is organized by wavelength range and spectral resolution. Click on a Model Number for additional information. Need a different
Material-specific high-resolution table-top extreme ultraviolet
Microscopy with extreme ultraviolet (EUV) radiation holds promise for high-resolution imaging with excellent material contrast, due to the short wavelength and numerous element-specific
Interferometry Based EUV Spectrometer | IEEE Journals & Magazine
A compact and wavelength-calibration-free interferometric scheme was numerically and experimentally investigated using an extreme ultraviolet (EUV) source generated by a laser
EUV and Plasma Technology
EUV spectrometers can be used to determine the reflectance of material samples and nanostructured samples, among other things. Optical
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